Product Show
9NP/8NP terminal purifier POU
Application field:

● Experimental analysis, scientific research and development
● Integrated circuit manufacturing, MAMS
● Single crystal silicon, polysilicon and silicon epitaxy Low leds, TFT
● Gallium nitride, silicon carbide, etc
● Gas purge, welding
● Ammonia purifier is applied in scientific research institutes
● Small terminal hydrogen purifier for high-tech instrument companies


Characteristics:

● Use at room temperature
● Repeated regeneration
● High removal depth of impurities
● Built-in micron filter, unique structure, prevent clogging
● Various models can be customized according to user needs
● Low usage cost


8NPSeries conventional model parameter table

Applicable gas

N2, H2, O2, Ar, He, NH3, SiH4, HCL

Processing capacity (L/min)

5

10

20

30

50

100

150

200

300

500

800

1000

Length (mm)

120

150

225

220

200

385

500

360

508

760

600

716

diameter

2'

2.5'

3'

4'

Inlet/outlet connector

1/4 VCR

1/2 VCR

Working pressure (Mpa)

1

Maximum gas pressure difference (Mpa)

0.1

Purification index

Single impurity1ppb

Service life

Six months (return to factory for regeneration)

Ø O Special models can be customized according to customer requirements.


9NP series conventional model parameter table

Applicable gas

N2, H2, O2, Ar, He, NH3, SiH4, HCL

Processing capacity (L/min)

5

10

20

30

50

100

150

200

300

500

800

1000

Length (mm)

130

180

275

260

380

500

435

550

780

600

900

1100

diameter

2'

2.5'

3'

4'

6'

Inlet/outlet connector

1/4 VCR

1/2 VCR

Working pressure (Mpa)

1

Maximum gas pressure difference (Mpa)

0.1

Purification index

Single impurity0.1ppb

Service life

Six months (return to factory for regeneration)

Ø O Special models can be customized according to customer requirements.